Monolithic film bulk acoustic wave resonator using SOI wafer

Title
Monolithic film bulk acoustic wave resonator using SOI wafer
Authors
김인태박윤권이시형이윤희이전국김남수주병권
Keywords
FBAR; piezoelectric; SOI; MMIC; membrane
Issue Date
2002-04
Publisher
제 4 회 한국 MEMS 학술대회 초록집
Citation
, 250-254
URI
http://pubs.kist.re.kr/handle/201004/14317
Appears in Collections:
KIST Publication > Conference Paper
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