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dc.contributor.author윤영수-
dc.date.accessioned2024-01-21T17:31:01Z-
dc.date.available2024-01-21T17:31:01Z-
dc.date.created2022-01-10-
dc.date.issued1998-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143253-
dc.title초전성 PZT 박막을 이용한 microelectromechanical system 소자의 제작-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전기전자재료, v.11, no.2, pp.135 - 139-
dc.citation.title전기전자재료-
dc.citation.volume11-
dc.citation.number2-
dc.citation.startPage135-
dc.citation.endPage139-
dc.subject.keywordAuthor초전송-
dc.subject.keywordAuthorPZT-
dc.subject.keywordAuthor적외선 센서-
dc.subject.keywordAuthorMEMS-
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