Design systhesis, and application of new Ti precursors compatible with Ba and Sr precursors for BST thin film by MOCVD

Title
Design systhesis, and application of new Ti precursors compatible with Ba and Sr precursors for BST thin film by MOCVD
Authors
우경자
Keywords
design; synthesis; Ti precursor; MOCVD; deposition rate
Issue Date
2002-06
Publisher
Journal de Physique Ⅳ
Citation
VOL 12, Pr4-45-Pr4-50
URI
http://pubs.kist.re.kr/handle/201004/14348
ISSN
1155-4339
Appears in Collections:
KIST Publication > Article
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