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실리콘 기판 위에 UHV-ICB 증착법으로 적층 성장된 Y2O3 박막의 BS/channeling 연구

Other Titles

BS/channeling studies on the heteroepitaxially grown Y2O3 films on Si substrates by UHV-ICB deposition

Authors

김효배; 조만호; 황보상우; 최성창; 최원국; 오정아; 송종한; 황정남

Issue Date

1997-08

Publisher

한국진공학회

Citation

한국진공학회지, v.6, no.3, pp.235 - 241

Keywords

backscattering

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/143657

Appears in Collections:

KIST Article > Others

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