Influence of electrodes and bragg reflector on the quality of thin film bulk acoustic wave resonators

Title
Influence of electrodes and bragg reflector on the quality of thin film bulk acoustic wave resonators
Authors
이시형김주형G. D. Mansfeld윤기현이전국
Keywords
bragg reflector; FBAR; Bulk acoustic wave resonators; AIN
Issue Date
2002-06
Publisher
IEEE Ultrasonic Ferroelectric & Frequency Control, Proeeding
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/14368
Appears in Collections:
KIST Publication > Conference Paper
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