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Enhancement of adhesion between Cu thin film and polyimide modified by ion assisted reaction

Other Titles

이온 보조 반응법에 의하여 표면처리된 Polyimide (PI) 표면과 구리박막의 접착력 향상

Authors

최성창; 최원국; 고석근; 석진우; 손용배; 정형진; 조준식

Issue Date

1997-06

Citation

Journal of ISHM, v.4, no.1, pp.19 - 30

Keywords

ion assisted reaction

URI

https://pubs.kist.re.kr/handle/201004/143770

Appears in Collections:

KIST Article > Others

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