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dc.contributor.author김지형-
dc.contributor.author이용혁-
dc.contributor.author권용성-
dc.contributor.author염근영-
dc.contributor.author송종한-
dc.date.accessioned2024-01-21T18:31:53Z-
dc.date.available2024-01-21T18:31:53Z-
dc.date.created2022-01-10-
dc.date.issued1997-05-
dc.identifier.issn1225-8822-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143822-
dc.languageKorean-
dc.publisher한국진공학회-
dc.titleMo- 화합물의 확산방지막으로서의 성질에 관한 연구-
dc.title.alternativeDiffusion barrier properties of mo compound thin films-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국진공학회지, v.6, no.2, pp.143 - 150-
dc.citation.title한국진공학회지-
dc.citation.volume6-
dc.citation.number2-
dc.citation.startPage143-
dc.citation.endPage150-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassother-
dc.subject.keywordAuthordiffusion barrier-
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