Elastic modulus and structural evolution of diamond-like carbon films deposited by RF-PACVD.

Title
Elastic modulus and structural evolution of diamond-like carbon films deposited by RF-PACVD.
Authors
정진원고대홍은광용이광렬
Keywords
elastic modulus
Issue Date
2002-07
Publisher
Diamond and Related Materials
Citation
v. 11, no. 7, 1441-1446.
URI
http://pubs.kist.re.kr/handle/201004/14386
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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