KIST Library Institutional Repository

Negative mask fabrication technique by laser writing for integrated optics

Authors

박경현; 변영태; 김명욱; 김선호; 최상삼; W.R. Cho; S.H. Park; U. Kim

Issue Date

1997-03

Citation

Optics & photonics news., v.8, no.3, pp.49 - 49

Keywords

laser lithography

URI

https://pubs.kist.re.kr/handle/201004/143901

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML