Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA process.

Title
Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA process.
Authors
강호관채경수문성욱오명환
Keywords
MEMS
Issue Date
2002-07
Publisher
전기전자재료학회 하계학술대회 논문집
Citation
v. 3, 1050-1053.
URI
http://pubs.kist.re.kr/handle/201004/14395
Appears in Collections:
KIST Publication > Conference Paper
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