Low-cost fabrication of high aspect ratio metallic structure for optical switch application using UV-LIGA process

Title
Low-cost fabrication of high aspect ratio metallic structure for optical switch application using UV-LIGA process
Authors
채경수정대석김종용김태엽신현준문성옥오명환
Keywords
MEMS; UV-LIGA; nickel; optical switch
Issue Date
2002-07
Publisher
Proceedings of ICEE
Citation
, 1291-1294
URI
http://pubs.kist.re.kr/handle/201004/14406
Appears in Collections:
KIST Publication > Conference Paper
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