Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining

Title
Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining
Authors
박종연Kun-Tae Kim이준섭이태훈권광민신현준문성욱박정호
Keywords
MRPBI system; UV-lithography; IR sensor; 3D MEMS antenna
Issue Date
2002-07
Publisher
Proceedings of ICEE
Citation
, 1444-1448
URI
http://pubs.kist.re.kr/handle/201004/14421
Appears in Collections:
KIST Publication > Conference Paper
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