Formation of MoSi₂-Si₃N₄ composite coating by reactive diffusion of Si on Mo substrate pretreated by ammonia nitridation

Title
Formation of MoSi₂-Si₃N₄ composite coating by reactive diffusion of Si on Mo substrate pretreated by ammonia nitridation
Authors
윤진국김긍호변지영이종권백영현김재수
Keywords
CVD; MoSi2-Si3N4 composite coating; molybdenum
Issue Date
2002-08
Publisher
Scripta Materialia
Citation
VOL 47, NO 4, 249-253
URI
http://pubs.kist.re.kr/handle/201004/14427
ISSN
1359-6462
Appears in Collections:
KIST Publication > Article
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