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Spectro-Ellipsometric Studies of Diamond-like Carbon Films Deposited by the Plasma Decomposition of Hydrocarbons

Authors

이성규; 이순일; Soo-Ghee Oh; 이광렬

Issue Date

1996-10

Publisher

한국표면공학회

Citation

한국표면공학회지, v.29, no.5, pp.532 - 539

Keywords

박막

ISSN

1225-8024

URI

https://pubs.kist.re.kr/handle/201004/144277

Appears in Collections:

KIST Article > Others

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