Properties of Ag thin films deposited in oxygen atmosphere using in-line magnetron sputter system

Title
Properties of Ag thin films deposited in oxygen atmosphere using in-line magnetron sputter system
Authors
구대영김원목조상무황만수이인규정병기이택성이경석조성훈
Keywords
transparent conducting films; Ag films; specific resistivity; oxygen; in-line sputter
Issue Date
2002-08
Publisher
한국재료학회지; Korean Journal of Materials Research
Citation
VOL 12, NO 8, 661-668
URI
http://pubs.kist.re.kr/handle/201004/14429
Appears in Collections:
KIST Publication > Article
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