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Characteristics of a nitrogen gas-pulsed electron cyclotron resonance plasma

Other Titles

질소 가스펄스 ECR 플라즈마의 특성

Authors

박용주; 김은규; 민석기; K. Ozasa; P. O'Keeffe; Y. Aoyagi

Issue Date

1996-07

Citation

응용물리 = Ungyong Mulli (The Korean physical society), v.9, no.4, pp.444 - 449

Keywords

질소 가스펄스 플라즈마; ECR; 전자온도; transient profile

URI

https://pubs.kist.re.kr/handle/201004/144397

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KIST Article > Others

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