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dc.contributor.author고석근-
dc.contributor.author최원국-
dc.contributor.author장홍규-
dc.contributor.author윤영수-
dc.contributor.author송석균-
dc.contributor.author박성철-
dc.contributor.author조준식-
dc.contributor.author김기환-
dc.contributor.author정형진-
dc.date.accessioned2024-01-21T19:39:53Z-
dc.date.available2024-01-21T19:39:53Z-
dc.date.created2022-01-10-
dc.date.issued1996-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/144516-
dc.titleApplications of ion beam of a few keV for thin film growth and surface modification-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationUngyong Mulli (The Korean physical society), v.9, no.2, pp.199 - 206-
dc.citation.titleUngyong Mulli (The Korean physical society)-
dc.citation.volume9-
dc.citation.number2-
dc.citation.startPage199-
dc.citation.endPage206-
dc.subject.keywordAuthorthin film-
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