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플라즈마 화학 증착된 질화텅스텐 박막의 불순물거동 및 확산특성

Authors

이창우; 김용태

Issue Date

1996-01

Citation

새물리 = Sae Mulli (The Korean physical society), v.36, no.4, pp.371 - 375

URI

https://pubs.kist.re.kr/handle/201004/144613

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KIST Article > Others

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