DSpace at KIST: Surface analysis of PZT film prepared by sputtering method

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DC Field	Value	Language
dc.contributor.author	김영관	-
dc.contributor.author	박주상	-
dc.contributor.author	추정우	-
dc.contributor.author	손병청	-
dc.contributor.author	이전국	-
dc.date.accessioned	2024-01-21T20:02:10Z	-
dc.date.available	2024-01-21T20:02:10Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144662	-
dc.title	Surface analysis of PZT film prepared by sputtering method	-
dc.title.alternative	Sputtering법에 의해 성장시킨 PZT박막의 표면 분석	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국진공학회지, v.5, no.2, pp.107 - 112	-
dc.citation.title	한국진공학회지	-
dc.citation.volume	5	-
dc.citation.number	2	-
dc.citation.startPage	107	-
dc.citation.endPage	112	-
dc.subject.keywordAuthor	스퍼터	-
dc.subject.keywordAuthor	PZT	-
dc.subject.keywordAuthor	표면 분석	-

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