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Reactive-metal ion beam과 산소 가스 ion beam 및 hybrid ion beam에 의한 주석 산화물 박막 물성 비교 연구

Other Titles

Property of tin-oxide thin films grown using a reactive-metal ion beam, an oxygen gas ion beam, and a hybrid ion beam

Authors

송석균; 최원국; 정형진; 고석근; 이정용; 백홍구

Issue Date

1996-01

Publisher

한국물리학회

Citation

응용물리, v.9, no.5, pp.686 - 694

Keywords

ion beam

ISSN

1013-7009

URI

https://pubs.kist.re.kr/handle/201004/144789

Appears in Collections:

KIST Article > Others

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