A study on the ZnO piezoelectric thin films for SAW filter by RF magnetron sputtering

Title
A study on the ZnO piezoelectric thin films for SAW filter by RF magnetron sputtering
Authors
최형욱김경환김상종강종윤안병국윤석진
Keywords
ZnO; preferred orientation; surface roughness; resistivity; RF magnetron sputter
Issue Date
2002-09
Publisher
전기전자재료학회논문지
Citation
VOL 15, NO 9, 798-807
URI
http://pubs.kist.re.kr/handle/201004/14483
Appears in Collections:
KIST Publication > Article
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