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이온 클러스터빔 증착법을 이용하여 증착된 구리박막의 특성 .

Authors

정형진; 고석근; 윤영수; 김기환; 김규철; 박태영; 이규왕; 박석진

Issue Date

1995-11

Citation

응용물리 ( 한국물리학회지 ), v.v. 8, no.no. 6, pp.616 - 623

URI

https://pubs.kist.re.kr/handle/201004/144928

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KIST Article > Others

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