Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias.

Title
Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias.
Authors
이중기고형덕현진변동진조병원박달근
Keywords
Cu/C film
Issue Date
2003-01
Publisher
Mat. Res. Soc. Symp. Proc.
Citation
v. 734, B9.49.1-B9.49.6.
URI
http://pubs.kist.re.kr/handle/201004/14507
Appears in Collections:
KIST Publication > Conference Paper
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