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dc.contributor.author이중기-
dc.contributor.author고형덕-
dc.contributor.author현진-
dc.contributor.author변동진-
dc.contributor.author조병원-
dc.contributor.author박달근-
dc.date.accessioned2015-12-02T05:12:47Z-
dc.date.available2015-12-02T05:12:47Z-
dc.date.issued200301-
dc.identifier.citationv. 734, B9.49.1-B9.49.6.-
dc.identifier.other17030-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/14507-
dc.publisherMat. Res. Soc. Symp. Proc.-
dc.subjectCu/C film-
dc.titleCharacteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias.-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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