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The effects of heat treatments of permalloy targets on the deposition rates of thin films

Other Titles

박막의 증착 속도에 미치는 타게트 열처리조건의 영향

Authors

김희중; 김현태; 한석희; 강일구; 김인응; 김상주

Issue Date

1995-05

Citation

대한금속학회지 = Journal of the Korean Institute of Metals, v.33, no.5, pp.591 - 598

Keywords

박막; 증착속도; 퍼멀로이 타게트; 잔류응력

ISSN

0253-3847

URI

https://pubs.kist.re.kr/handle/201004/145086

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KIST Article > Others

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