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dc.contributor.author김은규-
dc.contributor.authorK. Ozasa-
dc.contributor.authorY. Aoyaki-
dc.contributor.author민석기-
dc.date.accessioned2024-01-21T20:45:11Z-
dc.date.available2024-01-21T20:45:11Z-
dc.date.created2022-01-10-
dc.date.issued1995-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145156-
dc.titleIn-situ process 에 의한 indium oxide 의 선택성장과 GaAs 패턴에칭 .-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation응용물리, v.v. 8, no.no. 2, pp.157 - 161-
dc.citation.title응용물리-
dc.citation.volumev. 8-
dc.citation.numberno. 2-
dc.citation.startPage157-
dc.citation.endPage161-
dc.subject.keywordAuthorin-situ process-
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