Calibration of MEMS strain sensors fabricated on silicon: theory and experiments.

Title
Calibration of MEMS strain sensors fabricated on silicon: theory and experiments.
Authors
Charles HautamakiLi CaoJia ZhouSusan C. Mantell김태송
Keywords
calibration
Issue Date
2003-10
Publisher
Journal of Microelectromechanical Systems
Citation
v. 12, no. 5, 720-727.
URI
http://pubs.kist.re.kr/handle/201004/14521
ISSN
1057-7157
Appears in Collections:
KIST Publication > Article
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