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Measurements of lattice strain in SiO//2Si interface using convergent beam electron diffraction.

Other Titles

수렴성빔 전자회절법을 이용한 SiO//2Si 계면 부위의 격자 변형량 측정 =

Authors

김긍호; 우현정; 최두진

Issue Date

1995-01

Citation

한국전자현미경학회지 = Korean journal of electron microscopy, v.v. 25, no.no. 2, pp.73 - 79

Keywords

lattice strain

URI

https://pubs.kist.re.kr/handle/201004/145262

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KIST Article > Others

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