Surface-micromachined flexible polysilicon sensor array.

Title
Surface-micromachined flexible polysilicon sensor array.
Authors
황은수김용준주병권
Keywords
Flexible sensor
Issue Date
2003-01
Publisher
IEEE MEMS'03
Citation
, 582-585
URI
http://pubs.kist.re.kr/handle/201004/14530
Appears in Collections:
KIST Publication > Conference Paper
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