Surface micromachined microbolometer with the optimized VOx bolometric layer based on the sandwich structure of the V2O5/V/V2O5

Title
Surface micromachined microbolometer with the optimized VOx bolometric layer based on the sandwich structure of the V2O5/V/V2O5
Authors
문성욱한용희김근태Nguyen Chi-Anh신현준
Keywords
bolometer; vanadium oxide; TCR
Issue Date
2003-10
Publisher
The First International Symposium on Future in Nano-Optoelectronics
Citation
, 53-53
URI
http://pubs.kist.re.kr/handle/201004/14540
Appears in Collections:
KIST Publication > Conference Paper
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