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The study of facet evolution of AlGaAs/GaAs and AlAs/GaAs multilayers on mesa-patterned GaAs substrate by MOCVD.

Authors

김성일; 민석기; 김용; 김무성; 박양근; 이민석; 박영주

Issue Date

1994-01

Citation

Bull. Korean phys. soc., v.v. 12, no.no. 1, pp.? - ?

Keywords

MOCVD; GaAs; AlGaAs; facet evolution

URI

https://pubs.kist.re.kr/handle/201004/145678

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KIST Article > Others

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