Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김용태 | - |
| dc.contributor.author | 이창우 | - |
| dc.date.accessioned | 2024-01-21T21:45:08Z | - |
| dc.date.available | 2024-01-21T21:45:08Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1994-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/145706 | - |
| dc.title | Stress relaxation in plasma deposited tungsten nitride/tungsten bilayer. | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Appl. phys. lett., v.v. 65, no.no. 8, pp.965 - 967 | - |
| dc.citation.title | Appl. phys. lett. | - |
| dc.citation.volume | v. 65 | - |
| dc.citation.number | no. 8 | - |
| dc.citation.startPage | 965 | - |
| dc.citation.endPage | 967 | - |
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