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A nucleation process and the characteristics of Cu metal films in ionized cluster beam deposition

Other Titles

이온 클러스터 빔 (ionized cluster beam) 증착에서의 구리 금속의 핵 형성과 박막 특성

Authors

고석근; 이지연; 김철호; 정형진

Issue Date

1994-01

Publisher

한국물리학회

Citation

새물리, v.34, no.6, pp.713 - 720

Keywords

구리; 이온 클러스터 빔; 박막

ISSN

0374-4914

URI

https://pubs.kist.re.kr/handle/201004/145789

Appears in Collections:

KIST Article > Others

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