Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique

Title
Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique
Authors
박종연김근태문성욱박정호
Keywords
3D MEMS antenna; antenna; lithography; bonding; plastic micromachining
Issue Date
2003-02
Publisher
Nanotech 2003
URI
http://pubs.kist.re.kr/handle/201004/14582
Appears in Collections:
KIST Publication > Conference Paper
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