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CCl4 가스를 이용한 대기압 MOCVD로 성장시킨 InGaAs에서의 탄소도핑 특성

Authors

김용; 손창식; 김성일; 이민석; 김무성; 최인훈; 민석기

Issue Date

1994-01

Citation

응용물리, v.7, no.4, pp.278 - 283

Keywords

MOCVD; carbon doping; CCl4

URI

https://pubs.kist.re.kr/handle/201004/145877

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KIST Article > Others

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