The effects of H₂/N₂ mixed gas-plasma pretreatment of sapphire (0001) surface on the characteristics of GaN epilayers

Title
The effects of H₂/N₂ mixed gas-plasma pretreatment of sapphire (0001) surface on the characteristics of GaN epilayers
Authors
김재균박용주변동진김은규고의관박일우
Keywords
GaN; H₂/N₂ mixed gas-plasma; oxygen-deficient thin layer
Issue Date
2003-02
Publisher
Journal of the Korean Physical Society
Citation
v. 42, S446-S449
URI
http://pubs.kist.re.kr/handle/201004/14610
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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