TRISILAALKANES - NEW PRECURSORS FOR ULTRAFINE BETA-SILICON CARBIDE POWDERS

Authors
LEE, GHSONG, CHJUNG, IN
Issue Date
1993-02-20
Publisher
KOREAN CHEMICAL SOC
Citation
BULLETIN OF THE KOREAN CHEMICAL SOCIETY, v.14, no.1, pp.5 - 9
Keywords
CHEMICAL VAPOR-DEPOSITION; GAS-PHASE REACTION; SIH4-CH4-H2 SYSTEM; SIC POWDERS; CARBOSILANES; PARTICLES; CHEMICAL VAPOR-DEPOSITION; GAS-PHASE REACTION; SIH4-CH4-H2 SYSTEM; SIC POWDERS; CARBOSILANES; PARTICLES; trisilaalkanes; new precursor; ultrafine; silicon carbide; powders
ISSN
0253-2964
URI
https://pubs.kist.re.kr/handle/201004/146102
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KIST Article > Others
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