Growth of heteroepitaxial ZnO thin film by off-axis RF magnetron sputtering

Title
Growth of heteroepitaxial ZnO thin film by off-axis RF magnetron sputtering
Authors
박재완박종완이전국
Keywords
Heteroepitaxial
Issue Date
2003-03
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
v. 40, no. 3, 262-267
URI
http://pubs.kist.re.kr/handle/201004/14612
Appears in Collections:
KIST Publication > Article
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