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Patterning of Y-Ba-Cu-O thin films by reactive ion etching (RIE).

Other Titles

활성이온식각법에 의한 Y-Ba-Cu-O 고온초전도 박막의 미세선 제작 =

Authors

한택상; 최상삼; 김영환; 박종혁

Issue Date

1993-01

Citation

한국재료학회지 = Korean journal of materials research., v.제 3 권, pp.151 - 157

Keywords

Y-Ba-Cu-O 고온초전도 박막; 활성이온식각법; 임계온도; 임계전류

URI

https://pubs.kist.re.kr/handle/201004/146195

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KIST Article > Others

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