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The study on thin film fabrication using UHV-LCVD system (I)

Other Titles

UHV-LCVD 장치를 이용한 박막제작에 관한 연구 (I) : 장치 제작을 중심으로

Authors

최원국; 윤덕주; 공병인; 김창현; 황정남; 정광호

Issue Date

1993-01

Citation

Journal of the Korean vacuum society, v.2, no.2, pp.255 - 260

URI

https://pubs.kist.re.kr/handle/201004/146313

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KIST Article > Others

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