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A Formation of Thin Film by Ionized Cluster Beam Deposition

Other Titles

이온 크러스터빔 (Ionized Cluster Beam) 증착에 의한 박막형성 .

Authors

정형진; 고석근; 임종태; 송석준

Issue Date

1992-01

Citation

대한금속학회회보, v.v. 5, no.no. 2, pp.137 - 143

URI

https://pubs.kist.re.kr/handle/201004/146529

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KIST Article > Others

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