DSpace at KIST: Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process

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DC Field	Value	Language
dc.contributor.author	오태성	-
dc.contributor.author	이창봉	-
dc.contributor.author	이병찬	-
dc.contributor.author	오영제	-
dc.contributor.author	김윤호	-
dc.date.accessioned	2024-01-21T23:16:59Z	-
dc.date.available	2024-01-21T23:16:59Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1992-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/146560	-
dc.title	Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process	-
dc.title.alternative	Sol-gel 법으로 제조된 Ta2O5 박막의 유전특성과 누설전류 특성	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	Journal of the Korean ceramic society = 한국요업학회지, v.29, no.1, pp.29 - 34	-
dc.citation.title	Journal of the Korean ceramic society = 한국요업학회지	-
dc.citation.volume	29	-
dc.citation.number	1	-
dc.citation.startPage	29	-
dc.citation.endPage	34	-
dc.subject.keywordAuthor	sol-gel	-
dc.subject.keywordAuthor	Ta2O5 thin film	-
dc.subject.keywordAuthor	crystalline phase	-
dc.subject.keywordAuthor	dielectric properties	-
dc.subject.keywordAuthor	leakage current	-

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