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Metalorganic chemical vapor deposition of BaTiO//3 thin films on Si.

Other Titles

유기금속 화학기상증착법에 의한 Si 기판위의 BaTiO//3 박막증착 =

Authors

염상섭; 윤영수; 최상삼; D. H. Lee

Issue Date

1992-01

Citation

응용물리 = Korean appl. phys., v.v. 5, pp.193 - 197

Keywords

thin films; BaTiO//3; MOCVD

URI

https://pubs.kist.re.kr/handle/201004/146575

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KIST Article > Others

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