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Characteristics of Pd-MIS devices on hydrogen gas sensing.

Other Titles

Pd-MIS 소자의 수소가스 검지 특성 =

Authors

조원일; 이철환; 신치범; 윤경석; 주재백

Issue Date

1992-01

Citation

수소에너지 =, v.v. 3, no.no. 2, pp.17 - 24

Keywords

metal/insulator/semiconductor; p-type silicon; silicon oxide; hydrogen; response time; regeneration time; voltage shift; palladium; surface coverage

URI

https://pubs.kist.re.kr/handle/201004/146652

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