미세구조물 위에 제작된 탄소나노튜브 가스센서의 NH ₃가스 특성 측정 .

Title
미세구조물 위에 제작된 탄소나노튜브 가스센서의 NH ₃가스 특성 측정 .
Authors
문승일장윤택이윤희Soo-Won Kim주병권
Keywords
carbon nanotube; gas sensor; microstructure; room temperature
Issue Date
2003-05
Publisher
한국 MEMS 학술대회
Citation
, 454-457
URI
http://pubs.kist.re.kr/handle/201004/14670
Appears in Collections:
KIST Publication > Conference Paper
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