Formation process and microstructural evolution of Ni-silicide layers grown by chemical vapor deposition of Si on Ni substrate

Title
Formation process and microstructural evolution of Ni-silicide layers grown by chemical vapor deposition of Si on Ni substrate
Authors
윤진국변지영김긍호이종권윤호상홍경태
Keywords
formation process; microstructure evolution; CVD of Si; Ni-silicide; Nickel
Issue Date
2003-05
Publisher
Surface and Coatings Technology
Citation
VOL 168, 241-248
URI
http://pubs.kist.re.kr/handle/201004/14690
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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