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스파터링 조건이 Co-Hf-Pd 박막의 특성에 미치는 영향

Authors

한석희; 김희중; 노태환; 강일구; 이정중

Issue Date

1990-11

Citation

Korean Applied Physics (Korean Physical Society), v.4, no.4, pp.523 - 528

Keywords

Co alloy; thin film; sputtering

URI

https://pubs.kist.re.kr/handle/201004/147024

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KIST Article > Others

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