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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.date.accessioned2024-01-22T00:12:06Z-
dc.date.available2024-01-22T00:12:06Z-
dc.date.created2022-01-10-
dc.date.issued1990-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/147031-
dc.title산업전자에 응용되는 실리콘 IC 센서-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation경영과 자동화지, pp.22-
dc.citation.title경영과 자동화지-
dc.citation.startPage22-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthormicromachining-
dc.subject.keywordAuthormicrosensor-
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