Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation

Title
Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation
Authors
전기영김지수황정남임성일송종한송재훈최원국김현경
Keywords
Decaborane
Issue Date
2003-06
Publisher
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
Citation
v. 206, 409-412
URI
http://pubs.kist.re.kr/handle/201004/14716
ISSN
0168-583X
Appears in Collections:
KIST Publication > Article
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