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PECVD 비정질 실리콘박막의 증착공정에 대한 이론적모델 및 실험결과 .

Authors

김용태; 김진흥; 남철우; 우성일

Issue Date

1990-01

Citation

전자공학회논문지, v.v. 27, pp.68 - 77

URI

https://pubs.kist.re.kr/handle/201004/147181

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KIST Article > Others

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